BAY AREA AIR QUALITY MANAGEMENT DISTRICT
Best Available Control Technology (BACT) Guideline

Source Category

Source: Semiconductor Fabrication - Solvent Cleaning Stations Revision: 1
Document #: 149A.2.1
Class: All Date: 10/25/91

Determination

POLLUTANT

 BACT
1. Technologically Feasible/ Cost Effective
2. Achieved in Practice		 TYPICAL TECHNOLOGY
POC 1.  Enclosure of solvent station, and vent to abatement system w/ capture/destruction efficiency >90% or VOC outlet concentration <10 ppma
2.  Compliance with BAAQMD Reg. 8, Rule 30, and all solvent station reservoirs, sinks, and containers shall be provided with a cover and have a freeboard ratio >1.0.a		 1.  Collection System Vented to Incinerator or Carbon Adsorption Systema


2.  BAAQMD Approved Design and Operationa
NOx 1. n/a
2.  n/a		 1.  n/a
2. n/a
SO2 1. n/a
2.  n/a		 1.  n/a
2. n/a
CO 1. n/a
2.  n/a		 1.  n/a
2. n/a
PM10 1.  n/a
2.  n/a		 1.  n/a
2. n/a
NPOC 1.  Enclosure of solvent station, and vent to abatement system w/ capture/recovery efficiency >90% or VOC outlet concentration <10 ppma
2.  Compliance with BAAQMD Reg. 8, Rule 30, and all solvent station reservoirs, sinks, and containers shall be provided with a cover and have a freeboard ratio >1.0.a		 1.  Collection System Vented to Carbon Adsorption Systema


2.  BAAQMD Approved Design and Operationa

References

a. BAAQMD