BAY AREA AIR QUALITY MANAGEMENT DISTRICT
Best Available Control Technology (BACT) Guideline

Source Category

Source: Semiconductor Fabrication - Siliconizing Reactors, Furnace Chambers, and Chemical Vapor eposition Reactors Revision: 1
Document #: 149A.3.1
Class: All Date: 01/10/92

Determination

POLLUTANT

 BACT
1. Technologically Feasible/ Cost Effective
2. Achieved in Practice		 TYPICAL TECHNOLOGY
POC 1. n/a
2.  n/a		 1.  n/a
2. n /a
NOx 1. n/a
2.  n/a		 1.  n/a
2. n/a
SO2 1. n/a
2.  n/a		 1.  n/a
2. n/a
CO 1. n/a
2.  n/a		 1.  n/a
2. n/a
PM10 1.  n/d
2.  Exhaust vented to combustion chamber followed by wet scrubber w/ particulate control efficiency >99%		 1.   n/a
2.  BAAQMD Approved Design and Operationa
NPOC 1. n/a
2.  n/a		 1.  n/a
2. n/a

References

a. BAAQMD